JPH0128312Y2 - - Google Patents

Info

Publication number
JPH0128312Y2
JPH0128312Y2 JP1985012695U JP1269585U JPH0128312Y2 JP H0128312 Y2 JPH0128312 Y2 JP H0128312Y2 JP 1985012695 U JP1985012695 U JP 1985012695U JP 1269585 U JP1269585 U JP 1269585U JP H0128312 Y2 JPH0128312 Y2 JP H0128312Y2
Authority
JP
Japan
Prior art keywords
piezo
vibrator
pump
fluid
vibrators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985012695U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61130783U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985012695U priority Critical patent/JPH0128312Y2/ja
Publication of JPS61130783U publication Critical patent/JPS61130783U/ja
Application granted granted Critical
Publication of JPH0128312Y2 publication Critical patent/JPH0128312Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP1985012695U 1985-01-31 1985-01-31 Expired JPH0128312Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985012695U JPH0128312Y2 (en]) 1985-01-31 1985-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985012695U JPH0128312Y2 (en]) 1985-01-31 1985-01-31

Publications (2)

Publication Number Publication Date
JPS61130783U JPS61130783U (en]) 1986-08-15
JPH0128312Y2 true JPH0128312Y2 (en]) 1989-08-29

Family

ID=30496002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985012695U Expired JPH0128312Y2 (en]) 1985-01-31 1985-01-31

Country Status (1)

Country Link
JP (1) JPH0128312Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4586371B2 (ja) * 2004-01-30 2010-11-24 カシオ計算機株式会社 ポンプ装置及びダイヤフラムアクチュエータ
WO2012140931A1 (ja) * 2011-04-11 2012-10-18 株式会社村田製作所 流体制御装置およびポンプ接続方法

Also Published As

Publication number Publication date
JPS61130783U (en]) 1986-08-15

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